JPH0363581U - - Google Patents

Info

Publication number
JPH0363581U
JPH0363581U JP12506689U JP12506689U JPH0363581U JP H0363581 U JPH0363581 U JP H0363581U JP 12506689 U JP12506689 U JP 12506689U JP 12506689 U JP12506689 U JP 12506689U JP H0363581 U JPH0363581 U JP H0363581U
Authority
JP
Japan
Prior art keywords
inclined surface
little
quartz crucible
crucible
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12506689U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0730693Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989125066U priority Critical patent/JPH0730693Y2/ja
Publication of JPH0363581U publication Critical patent/JPH0363581U/ja
Application granted granted Critical
Publication of JPH0730693Y2 publication Critical patent/JPH0730693Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1989125066U 1989-10-27 1989-10-27 シリコン単結晶引上げ用石英ルツボ Expired - Fee Related JPH0730693Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989125066U JPH0730693Y2 (ja) 1989-10-27 1989-10-27 シリコン単結晶引上げ用石英ルツボ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989125066U JPH0730693Y2 (ja) 1989-10-27 1989-10-27 シリコン単結晶引上げ用石英ルツボ

Publications (2)

Publication Number Publication Date
JPH0363581U true JPH0363581U (en]) 1991-06-20
JPH0730693Y2 JPH0730693Y2 (ja) 1995-07-12

Family

ID=31672952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989125066U Expired - Fee Related JPH0730693Y2 (ja) 1989-10-27 1989-10-27 シリコン単結晶引上げ用石英ルツボ

Country Status (1)

Country Link
JP (1) JPH0730693Y2 (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008002668A (ja) * 2006-06-26 2008-01-10 Kurabo Ind Ltd 真空断熱材
JPWO2017110763A1 (ja) * 2015-12-21 2018-06-28 株式会社Sumco シリカガラスルツボ、シリカガラスルツボの製造方法、シリコン単結晶の引き上げ装置、インゴットおよびホモエピタキシャルウェーハ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5345318A (en) * 1976-10-06 1978-04-24 Toshiba Ceramics Co Process and apparatus for preparing glass vessel and the like of high silica content
JPS62129069U (en]) * 1986-02-05 1987-08-15
JPS63319288A (ja) * 1987-06-23 1988-12-27 Shin Etsu Handotai Co Ltd 鍔付石英るつぼ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5345318A (en) * 1976-10-06 1978-04-24 Toshiba Ceramics Co Process and apparatus for preparing glass vessel and the like of high silica content
JPS62129069U (en]) * 1986-02-05 1987-08-15
JPS63319288A (ja) * 1987-06-23 1988-12-27 Shin Etsu Handotai Co Ltd 鍔付石英るつぼ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008002668A (ja) * 2006-06-26 2008-01-10 Kurabo Ind Ltd 真空断熱材
JPWO2017110763A1 (ja) * 2015-12-21 2018-06-28 株式会社Sumco シリカガラスルツボ、シリカガラスルツボの製造方法、シリコン単結晶の引き上げ装置、インゴットおよびホモエピタキシャルウェーハ

Also Published As

Publication number Publication date
JPH0730693Y2 (ja) 1995-07-12

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Legal Events

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LAPS Cancellation because of no payment of annual fees